Title:
【発明の名称】位置検出ヘッド及びその製造方法
Document Type and Number:
Japanese Patent JP3331770
Kind Code:
B2
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Inventors:
Osamu Ochiai
Application Number:
JP22822994A
Publication Date:
October 07, 2002
Filing Date:
September 22, 1994
Export Citation:
Assignee:
Sony Precision Technology Inc.
International Classes:
G01B7/00; G01D5/245; (IPC1-7): G01D5/245; G01B7/00
Domestic Patent References:
| JP6229779A |
Attorney, Agent or Firm:
Hidemori Matsukuma