Title:
【発明の名称】固体撮像素子及びその製造方法
Document Type and Number:
Japanese Patent JP3028546
Kind Code:
B2
Abstract:
PURPOSE:To contrive to improve the light-shielding power of an optical black part by a method wherein shunt wirings are not formed on the optical black part and a two-layer light-shielding film is formed on the optical black part. CONSTITUTION:An effective pixel part 1, which is surrounded with an optical black part 2 on a plane, is formed on a semiconductor substrate, such as a silicon substrate or the like. A first light-shielding conductive film is formed as shunt wirings 3 on the part 1 and at the same time, is formed as light- shielding films 4 and 7 on the part 2, whereby a light-shielding film combines a second light-shielding conductive film into two layers on the part 2. The light-shielding power of the part 2 is increased by forming the light-shielding films 4 and 7 into two layers in such a way and thereby problems, such as an increase in the number of processes, the deterioration of a processing accuracy and the like, can be eliminated.
Inventors:
Kazuya Yonemoto
Kazushi Wada
Michio Negishi
Koichi Harada
Kazushi Wada
Michio Negishi
Koichi Harada
Application Number:
JP4817990A
Publication Date:
April 04, 2000
Filing Date:
February 28, 1990
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L27/14; H01L27/148; H04N5/335; H04N5/341; H04N5/361; H04N5/369; H04N5/3728; (IPC1-7): H01L27/14; H01L27/148; H04N5/335
Attorney, Agent or Firm:
Akira Koike (2 outside)