Title:
【発明の名称】蒸気乾燥法及びその装置
Document Type and Number:
Japanese Patent JP2610062
Kind Code:
B2
Inventors:
Kohei Ninomiya
Kikuchi Masao
Yu Umeda
Motoya Yamaya
Kikuchi Masao
Yu Umeda
Motoya Yamaya
Application Number:
JP28132790A
Publication Date:
May 14, 1997
Filing Date:
October 19, 1990
Export Citation:
Assignee:
Ube Industries,Ltd.
Watanabe Shoko Co., Ltd.
Watanabe Shoko Co., Ltd.
International Classes:
F26B3/04; F26B9/06; H01L21/304; H05K3/26; (IPC1-7): H01L21/304; F26B3/04; F26B9/06
Domestic Patent References:
| JP62106630A | ||||
| JP1155928A | ||||
| JP63182818A | ||||
| JP62260324A |
Attorney, Agent or Firm:
Osamu Hatori