Title:
【発明の名称】スパッタリング用ターゲット組立体およびその製造方法
Document Type and Number:
Japanese Patent JP2634678
Kind Code:
B2
Inventors:
MINAKI YOSHIHIRO
KAZUYASU MUTSUO
KAZUYASU MUTSUO
Application Number:
JP33019089A
Publication Date:
July 30, 1997
Filing Date:
December 20, 1989
Export Citation:
Assignee:
HITACHI KINZOKU KK
YASUGI SEISAKUSHO KK
YASUGI SEISAKUSHO KK
International Classes:
B23K1/00; B23K33/00; C23C14/34; (IPC1-7): C23C14/34; B23K1/00; B23K33/00
Domestic Patent References:
| JP63317668A | ||||
| JP6447864A | ||||
| JP6462464A |
Attorney, Agent or Firm:
Oba Mitsuru