Title:
METHOD FOR CLEANING SUBSTRATE FOR LIQUID CRYSTAL DISPLAY PANEL
Document Type and Number:
Japanese Patent JPH0798443
Kind Code:
A
Abstract:
PURPOSE: To reduce the contamination with org. matter in chemical cleaning, to more efficiently clean off the inorg. matter contained in the org. matter, to improve the wettability of a substrate, to improve the physical cleaning effect and further to obtain the uniform substrate without any spot after drying.
CONSTITUTION: UV is radaited to break the chemical bond of the org. matter on a substrate, the molecule with the bond broken is oxidized with the ozone generated by the radiation of UV or excited oxygen atom to decompose, vaporize and remove the org. matter by optical cleaning, and then the substrate is chemically and/or physically cleaned.
Inventors:
MIYASHITA MAKOTO
KUMAGAI AKIO
OGAWA HIROSHI
KUMAGAI AKIO
OGAWA HIROSHI
Application Number:
JP24266893A
Publication Date:
April 11, 1995
Filing Date:
September 29, 1993
Export Citation:
Assignee:
DAINIPPON INK & CHEMICALS
International Classes:
G02F1/13; (IPC1-7): G02F1/13
Attorney, Agent or Firm:
Takahashi victory
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