Title:
FORMATION OF WATER REPELLING FILM OF CARBON CONTAINING FLUORINE
Document Type and Number:
Japanese Patent JPH0624804
Kind Code:
A
Abstract:
PURPOSE: To improve introduction efficiency of a fluorine atom into the film, in a forming method of a water-repellent film which is formed by a PVC method or a CVD method together with a carbon source by using gas of compounds such as CF4, C2F2 and C3F6.
CONSTITUTION: The gas of the compounds which has a C-F bond and the bond with a carbon whose bond energy is smaller than a bond energy of a C-F bond, is used as a fluorine source and the film is formed by the PVD method or CVD method together with the carbon source. Thus, since the bond with smaller bond energy is preferentially cut at the film forming time and a radical containing fluorime is formed, the introduction efficiency of fluorine into the film is enhanced.
More Like This:
| JP5488747 | refrigerator |
| JP2016167078 | COVER GLASS FOR ELECTRONIC EQUIPMENT AND MANUFACTURING METHOD THEREOF |
| JP2016530182 | Optical structure with integrated component layers |
Inventors:
NAKANISHI MASAJI
TAJIMA ICHIRO
ISHII MASAHIKO
TAJIMA ICHIRO
ISHII MASAHIKO
Application Number:
JP17570092A
Publication Date:
February 01, 1994
Filing Date:
July 02, 1992
Export Citation:
Assignee:
TOYOTA MOTOR CORP
TOYOTA CENTRAL RES & DEV
TOYOTA CENTRAL RES & DEV
International Classes:
C03C17/28; (IPC1-7): C03C17/28
Attorney, Agent or Firm:
Hiroshi Okawa