Title:
【発明の名称】真空把持装置及びICテストハンドラ
Document Type and Number:
Japanese Patent JP2816114
Kind Code:
B2
Abstract:
PURPOSE: To provide a highly durable vacuum gripping device by arranging a rockable suction pad in which an airtight elastic fitting ring fitted in a fitting ring positioning area of a movable intake nozzle shaft is positioned in an inner circumference storage part. CONSTITUTION: An intake nozzle shaft 24 can be oscillated with elastic restoring force to a certain extent toward a bearing member 22 by means of elastic deformation of the first O-ring 23, while a stainless suction pad 26 can be swigged with elastic restoring force to a certain extent by means of an oscillatory movement characteristic of the intake nozzle shaft 24 and elastic deformation, which is multiplied by the oscillatory movement characteristic of the intake nozzle shaft 24, of the second O-ring 25. Therefore, a suction characteristic to a sucked face in the multiple directions can be exhibited. The elastic deformations generated in a first and a second O-rings 23, 25 are equal to one another in any ring cross sectional face, and bending deformation is not generated, so that no weak point part, on stress is generated. Therefore, excellent durability can be provided.
More Like This:
| JPS6234791 | SUPERFINE PACKAGING MACHINE WITH VISUAL DEVICE |
| JPH02292152 | SUCTION PAD DEVICE |
Inventors:
Masato Ito
Application Number:
JP14794695A
Publication Date:
October 27, 1998
Filing Date:
June 15, 1995
Export Citation:
Assignee:
Shinano Electronics Co., Ltd.
International Classes:
B25J15/06; H01L21/677; H01L21/68; G01R31/26; (IPC1-7): B25J15/06; G01R31/26; H01L21/68
Domestic Patent References:
| JP4913868A | ||||
| JP2117885U | ||||
| JP2126792U |
Attorney, Agent or Firm:
Minoru Yamada