Title:
【発明の名称】希ガスハライドエキシマレーザの復旧の方法
Document Type and Number:
Japanese Patent JP2605685
Kind Code:
B2
Inventors:
Kazuaki Hotta
Shinji Ito
Shinji Ito
Application Number:
JP28387385A
Publication Date:
April 30, 1997
Filing Date:
December 16, 1985
Export Citation:
Assignee:
NEC
International Classes:
H01S3/104; H01S3/03; H01S3/05; (IPC1-7): H01S3/05
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)