Title:
【発明の名称】薄膜を付着した部品の再生利用方法
Document Type and Number:
Japanese Patent JP2720966
Kind Code:
B2
Inventors:
ARAMAKI MINORU
NAKANO HISAHARU
SUENAGA TAKASHI
YANAGII KYOSHI
ARAI HIROMICHI
NAKANO HISAHARU
SUENAGA TAKASHI
YANAGII KYOSHI
ARAI HIROMICHI
Application Number:
JP17294787A
Publication Date:
March 04, 1998
Filing Date:
July 13, 1987
Export Citation:
Assignee:
SENTORARU GARASU KK
International Classes:
C09K13/08; C23C14/00; C23C14/22; C23F1/12; H01L21/205; (IPC1-7): C23C14/00; C09K13/08; C23F1/12
Domestic Patent References:
| JP6233761A | ||||
| JP4619008B1 |
Other References:
【文献】英国特許1180187(GB,B)
Attorney, Agent or Firm:
Yoshiyuki Nishi (1 person outside)