Title:
ILLUMINATION OPTICAL APPARATUS AND PROJECTION ALIGNER
Document Type and Number:
Japanese Patent JP3101613
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance both the uniformity of the illuminance at the surface on which light is applied, and the uniformity of the number of the illuminating apertures.
SOLUTION: This illuminating optical apparatus, having a fly-eye lens 5 forming a secondary light source which uses luminous flux from a light source 1 and a condenser optical system 6 which illuminates a surface to be illuminated (a reticle 9 or a wafer 11) by the use of the luminous flux from the secondary light source. The condenser optical system 6 is constituted so that the numbers of the apertures observed from the respective point on the surface to be illuminated become substantially equal. At the same time, an ND filter 51 for equalizing the illuminace on the surface to be illuminated is provided.
Inventors:
Hiroshi Sato
Application Number:
JP273199A
Publication Date:
October 23, 2000
Filing Date:
January 08, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; G02B3/00; G02B3/08; G02B19/00; G03F7/20; (IPC1-7): H01L21/027; G02B3/00; G02B3/08; G03F7/20
Domestic Patent References:
| JP7306304A | ||||
| JP8262367A | ||||
| JP97940A | ||||
| JP922869A | ||||
| JP9223661A | ||||
| JP9190969A | ||||
| JP9127418A | ||||
| JP737774A |
Attorney, Agent or Firm:
Keizo Nishiyama (2 outside)