Title:
照明光学装置、露光装置、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP4752702
Kind Code:
B2
Inventors:
Osamu Yatsu
Koji Shigematsu
Hiroyuki Hirota
Toshiyuki Matsuyama
Koji Shigematsu
Hiroyuki Hirota
Toshiyuki Matsuyama
Application Number:
JP2006262588A
Publication Date:
August 17, 2011
Filing Date:
September 27, 2006
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G02B5/30; G03F7/20
Domestic Patent References:
| JP653120A | ||||
| JP10104427A | ||||
| JP200275816A | ||||
| JP9184918A | ||||
| JP200335822A | ||||
| JP2003297727A | ||||
| JP200359821A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Yoshiki Kuroki