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Patent Searching and Data


Title:
ILLUMINATOR, PROJECTION ALIGNING METHOD, PROJECTION ALIGNER, AND PROCESS FOR FABRICATING MICRODEVICE
Document Type and Number:
Japanese Patent JP2006253486
Kind Code:
A
Abstract:

To provide an illuminator in which deterioration of a reflective element group for creating a secondary light source group can be suppressed.

The illuminator comprises a reflective element group (3a) having a large number of reflective elements arranged in parallel in order to form a secondary light source group based on the luminous flux from a light source, a capacitor optical system (4) for introducing light from the secondary light source group to a surface being irradiated, and a means for removing a part of light directed toward a region on the reflective surface side of the reflective element group (3a). Light being removed by the removing means is such light as being directed toward a nonreflective region occurring in the above-mentioned region depending on the relationship of arrangement of the large number of reflective elements.


Inventors:
SUZUKI KENJI
Application Number:
JP2005069437A
Publication Date:
September 21, 2006
Filing Date:
March 11, 2005
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B13/14; G02B13/24; G02B17/08; G03F7/20
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori