Title:
粒子顕微鏡を用いる画像記録方法
Document Type and Number:
Japanese Patent JP7232326
Kind Code:
B2
Abstract:
A method, including: recording plural images of an object by scanning plural particle beams across the object and detecting signals generated by the particle beams, wherein the plural particle beams are generated by a multi-beam particle microscope; determining plural regions of interest; determining plural image regions in each of the recorded images; determining plural displacement vectors; and determining image distortions based on image data of the recorded images and the determined displacement vectors.
Inventors:
Zydra Dirk
Kolb Thomas
football philippe
Neumann Jens Timo
Riedesel Christoph
Wojek Christian
Correa Joaquin
hegel wolfgang
Kolb Thomas
football philippe
Neumann Jens Timo
Riedesel Christoph
Wojek Christian
Correa Joaquin
hegel wolfgang
Application Number:
JP2021518103A
Publication Date:
March 02, 2023
Filing Date:
October 01, 2019
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
H01J37/22; G06T5/00
Domestic Patent References:
| JP2007298397A |
Foreign References:
| US20150348749 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Naoki Kondo
Takeo Nasu
Hiroshi Oura
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Naoki Kondo
Takeo Nasu
Hiroshi Oura
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