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Title:
Imprint method, manufacturing method of imprint device and device
Document Type and Number:
Japanese Patent JP6315904
Kind Code:
B2
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Inventors:
Yoshikazu Miyajima
Yukio Takabayashi
Shinichi Sudo
Application Number:
JP2013136919A
Publication Date:
April 25, 2018
Filing Date:
June 28, 2013
Export Citation:
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Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
JP2009266841A
JP2010093187A
JP2012054322A
JP2011009250A
JP2012134558A
JP2008149705A
JP2012238674A
Foreign References:
WO2012063948A1
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa



 
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