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Title:
INFRARED DETECTOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH05226626
Kind Code:
A
Abstract:

PURPOSE: To realize an infrared detector with less generation of crosstalk by forming an inversion layer on the surface of a P-type Hg1-xCdxTe layer between edge parts of an N-type Hg1-xCdxTe layer which become picture elements.

CONSTITUTION: An anode oxide film 11 which cannot be attached easily by an etching chemical is selectively formed on a forming part of a contact hole 6 of mesa-shaped or planar-type N-type Hg1-xCdxTe layers 3 and 9 which become picture elements. Then, since the anode oxide film 11 is selectively formed at a specified position between edge parts of mesa or planar-type layers 3 and 9 which become picture elements, an inversion layer 12 is formed selectively at the lower P-type Hg1-xCdxTe layer 2 and a minority carrier electron 8 is absorbed, thus preventing the minority carrier electron 8 from reaching the adjacent mesa-shaped or planar-type layers 3 and 9 through the surface of the P-type Hg1-xCdxTe layer 2 due to diffusion and obtaining a highly reliable infrared ray detection element with less generation of crosstalk.


Inventors:
UEDA TOSHIYUKI
MIYAMOTO YOSHIHIRO
YAMAMOTO TAMOTSU
Application Number:
JP2368292A
Publication Date:
September 03, 1993
Filing Date:
February 10, 1992
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/205; H01L27/14; H01L29/41; (IPC1-7): H01L21/205; H01L27/14; H01L29/44
Attorney, Agent or Firm:
Teiichi



 
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