To provide an inkjet recording head which has a high reliability and a superior ejection performance by enabling a side wall face of an ink supply port to be coated with a protecting film resistant to ink by a necessary minimum, and to provide its manufacturing method.
When the ink supply port is formed by etching a part exposed from an etching mask 400 of a silicon substrate 100, coating the etched part of the substrate, and alternately repeating the etching and coating until the part links with a liquid passage, if (a) and b are in the range of not larger than 1 μm and not larger than 5 μm, respectively, when a depth of a recess formed in the side wall face of the ink supply port is made (a) and a distance between adjacent projections is made b, b/a≥1.7 is held.
Ishibashi Masayuki
Shinichi Iwata
Masaaki Ogata
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