Title:
INSPECTION DEVICE AND INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2023007926
Kind Code:
A
Abstract:
To provide an inspection device and an inspection method that shorten a measurement time.SOLUTION: An inspection device includes: a power supply part that applies a predetermined output voltage to a plurality of inspected bodies; a switch part that switches each inspected body measuring a current; a measurement part that measures the current of each inspected body selected by the switch part; and a control part that controls the switch part. The control part switches a sequential system that performs a current measurement for predetermined times against the other inspected bodies by switching the switch part after the current measurement is performed for the predetermined times to one inspected body on the basis of a setting value related to the set current measurement and a scanning system that switches the switch part after the current measurement is performed to the one inspected body to repeat an implementation of the current measurement to the other inspected bodies for the predetermined times.SELECTED DRAWING: Figure 3
Inventors:
ISHII SHIGEKI
NARUKAWA KENICHI
KUREBAYASHI SHINYA
NARUKAWA KENICHI
KUREBAYASHI SHINYA
Application Number:
JP2021111076A
Publication Date:
January 19, 2023
Filing Date:
July 02, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/66; G01R31/26
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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