Title:
INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPS60261133
Kind Code:
A
Abstract:
PURPOSE:To enable even inspection at a time when the size of a pattern to be inspected differs from a design data pattern by providing a means through which the magnification of image formation is varied while the optical path of an optical system image-forming a circuit forming pattern image to a sensor is kept constant. CONSTITUTION:A lens 19 is fitted to the upper section of an objective 9, and the pattern image of a photo-mask 1 image-formed by the objective 9 is image- formed to a pattern sensor 10. The lens 19 is driven by a motor 23 controlled by a magnification variable control section 25 connected to a microprocessor 15. Since data 12 in a magnetic tape and the error of magnification of the photo- mask 1 are determined previously on the manufacture of the photo-mask, the informations are inputted previously to the microprocessor 15. The magnification variable control section 25 drives the motor 23 on the basis of a command from the microprocessor 15, and moves the lens 19 up to a predetermined position.
Inventors:
NOMOTO MINEO
AIUCHI SUSUMU
AIUCHI SUSUMU
Application Number:
JP11638784A
Publication Date:
December 24, 1985
Filing Date:
June 08, 1984
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01N21/88; G01N21/93; G01N21/956; G03F1/84; H01L21/027; H01L21/30; H01L21/66; (IPC1-7): H01L21/30; H01L21/66
Attorney, Agent or Firm:
Akio Takahashi