PURPOSE: To obtain an inspection equipment for substrate in which a substrate to be inspected can be aligned accurately with a contactor at inspecting section.

CONSTITUTION: The inspection equipment for substrate comprises a movable mounting stage 3, a contactor block 30 disposed oppositely to the mounting stage 3 while having a large number of contactors touching respective pads on a substrate, a plurality of alignment pins 33 provided closely to the contactor for each contactor block 30 while keeping a predetermined positional relationship with the contactor 32, means for grasping the positional information of the contactor 32 and the mounting stage 3 with respect to the alignment pins 33 and previously storing the relative positional information as an initial set data, a first camera 34a fixed on the mounting stage 3 movably therewith in order to detect the position of alignment pin 33, a second camera 34b for detecting the position of electrode pad of a substrate 2 mounted on the stage 3, means for calculating the position of the substrate on the stage 3 based on the position detection results thus obtained and an initial set data being called, and means for shifting the stage 3 directly under the contactor block 30 based on the calculated position of the substrate and bringing the pad into contact with the contactor.