Title:
検査治具及び検査方法
Document Type and Number:
Japanese Patent JP7145643
Kind Code:
B2
Abstract:
The present invention provides an inspection jig and an inspection method, which are possible to exactly measure a pixel size of a photographing means. A plate-shaped inspection jig (100), which measures a pixel size of a photographing means of a processing device, comprises: a first pattern (102) having different width on a surface of a plate body (101); a second pattern (103) and a third pattern (104); and a two-dimensional code (105) recording measurement values of each width (La, Lb, Lc) of the first pattern (102), the second pattern (103) and the third pattern (104).
Inventors:
Satoshi Hanashima
Application Number:
JP2018095521A
Publication Date:
October 03, 2022
Filing Date:
May 17, 2018
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; H01L21/66
Domestic Patent References:
| JP2011169677A | ||||
| JP2008003000A | ||||
| JP2016213342A | ||||
| JP2016179505A | ||||
| JP2009074952A | ||||
| JP2006170790A | ||||
| JP7039546A |
Foreign References:
| KR1020060089798A |
Attorney, Agent or Firm:
Sakai International Patent Office
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