Title:
INSPECTION METHOD OF LIGHT TRANSMISSIVE BODY, INSPECTION DEVICE, INSPECTION PROGRAM AND RECORDING MEDIUM
Document Type and Number:
Japanese Patent JP2002156337
Kind Code:
A
Abstract:
To provide an inspection method for inspecting fine defects by imaging transmitted light through a light-transmitting body, such as a glass tube, an image processing algorithm of the picked-up image, and to provide a device using them.
A slit light 5L is used as illumination light, and the slit light 5L is set so as to be in parallel with the rotation axis of an inspection object 1 or to intersect with the rotation axis in the horizontal direction.
Inventors:
MIYAUCHI TAKASHI
Application Number:
JP2000349235A
Publication Date:
May 31, 2002
Filing Date:
November 16, 2000
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01N21/896; (IPC1-7): G01N21/896
Attorney, Agent or Firm:
Norio Ogo (2 outside)
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