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Title:
Inspection method
Document Type and Number:
Japanese Patent JP6018929
Kind Code:
B2
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Inventors:
Isobe
Hideo Tsuchiya
Akiyama Hiroteru
Yabe Makoto
Takafumi Inoue
Application Number:
JP2013006162A
Publication Date:
November 02, 2016
Filing Date:
January 17, 2013
Export Citation:
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Assignee:
New Flare Technology Co., Ltd.
International Classes:
G01N21/956; G01B11/00; G01B11/24
Domestic Patent References:
JP2006267250A
JP2000147749A
JP2001281160A
JP2009229159A
JP2003223630A
Attorney, Agent or Firm:
Kurata Masatoshi
Nobuhisa Nogawa
Takashi Mine
Naoki Kono
Tadashi Inoue
Ukai Ken
Atsuko Oaku



 
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