Title:
検査方法
Document Type and Number:
Japanese Patent JP4664334
Kind Code:
B2
Abstract:
By allowing an electrical conduction between a probe and an electrode by a fritting phenomenon before inspection, simplification of circuit configuration and shortening of inspection time is achieved. A fritting circuit is formed in a probe card of an inspection apparatus for each probe pair consisting of two probes. A capacitor is connected to each fritting circuit. Each fritting circuit is connected in parallel to a power supply circuit having a charging power supply. Each capacitor is charged at one time by the power supply circuit. The probe pair is brought into contact with an electrode of a wafer, and a high-voltage is applied to the probe pair by a power charged in the capacitor, thereby achieving an electrical connection between each probe and the electrode by a fritting phenomenon. Then, an inspection of electrical characteristics is performed by using an electric inspection signal transmitted to each probe.
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Inventors:
Shigekazu Komatsu
Shinozaki University
Katsuaki Sakamoto
Shinozaki University
Katsuaki Sakamoto
Application Number:
JP2007189500A
Publication Date:
April 06, 2011
Filing Date:
July 20, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R1/073; G01R1/067; G01R31/26; H01L21/66
Domestic Patent References:
| JP2004191208A | ||||
| JP3179708A | ||||
| JP4269557A | ||||
| JP5041312A |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara