Title:
検査レシピ自動生成装置、ならびに検査レシピ自動生成プログラムおよびそれを記録した記録媒体
Document Type and Number:
Japanese Patent JP5379621
Kind Code:
B2
Inventors:
Takao Tanaka
Application Number:
JP2009216022A
Publication Date:
December 25, 2013
Filing Date:
September 17, 2009
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/027; H01L21/02; H01L21/304; H01L21/306
Domestic Patent References:
| JP2005101078A | ||||
| JP2005123249A | ||||
| JP2008251977A | ||||
| JP2004025057A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki