PURPOSE: To always enable the inspection of an appropriate pin accurately, by moving an IC on a rail portion to the inspection position to vary the movement thereof according to the type thereof.

CONSTITUTION: A conveying means A with rails 2 and 3 for conveying the IC 4 set successively before and after a rail portion 1 adapted to reciprocate with IC 4 being borne. The rail portion 1 is supported with a support mechanism (B) and fixed at an inspection position with a position setting mechanism (C). A scan type inspection mechanism (E) transmits a beam light to or receives it from a pin of an IC 4 arranged at the inspection position with a beam light transmitting/receiving mechanism (F) while the beam light is moved roughly at the right angle to the direction of irradiation thereof. With such an arrangement, as the rail portion 1 is separated from other conveying rails 2 and 3, the IC is moved to the inspection position with the IC on the rail portion 1 and after the inspection, it returns back to the conveying positions rails 2 and 3. This enables the setting of the movement of the IC properly; therefore if the pin is longer, it moves for a short distance and if the pin is shorter, it moves for a long distance. Thus, according to the length of the pin, the IC can be arranged at the inspection position.