Title:
INSTRUMENT FOR MEASURING ILLUMINANCE, AND EXPOSURE DEVICE
Document Type and Number:
Japanese Patent JP2002340667
Kind Code:
A
Abstract:
To measure information as to illuminance while saving space, without increasing the cost.
An emitted beam is received to measure the information about the illuminance of the beam. This instrument is provided with a photoreceiver 21 for photoreceiving the beam, a specifying device 23 for specifying a photoreceiving area for the beam emitted to the photoreceiver 21 in plural ranges, and a switching device for driving the specifying device 23 to switch the range of the photoreceiving area.
Inventors:
SASAMOTO MASAKI
Application Number:
JP2001145324A
Publication Date:
November 27, 2002
Filing Date:
May 15, 2001
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01J1/02; G03F7/20; H01L21/027; (IPC1-7): G01J1/02; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga (5 outside)
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