To prevent a measurement error by an operator in the case of measuring a particle on the surface to be measured.
An anchor block 42 is placed on a surface to be measured, a gear ring 34 supported by a bearing 40 is meshed with a probe 14 on one end side of a rack 44, and the probe 14 moves along the probe anchor block 42. Thus, the probe head 18 linearly moves on the surface to be measured while turning the gear ring 34. Then, the probe 14 can smoothly be moved, and an contact error of a distance and a measurement surface by an operator can be eliminated. Furthermore, air is blown out from air blowout holes 28, particles on the surface to be measured are blown up, the particles separated from the surface to be measured are sucked through a vacuum hole 26, and the number of the particle is counted by a particle measuring machine.
SATO KAYOKO
MORITA HIDEAKI
UTSUKI TOMOKATSU
TOMINAGA YUKIHIRO
