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Patent Searching and Data


Title:
INTERATOMIC FORCE MICROSCOPE
Document Type and Number:
Japanese Patent JPH07110232
Kind Code:
A
Abstract:

PURPOSE: To accurately measure the force acting on a cantilever without adjusting the rotation of an optical position detector.

CONSTITUTION: A displacement measuring section 40 which detects the displacement of a cantilever 20 incorporates an optical position detector 42 which detects the displacement of the cantilever 20 as displacement components respectively parallel to two axes perpendicular each other on a surface to be detected from the positional change of the spot of reflected light L' from the surface to be detected and a signal processing circuit 43 which performs linear transformation corresponding to the coordinate transformation of the two axes perpendicular to each other into another two axes perpendicular to each other on the surface to be measured on a displacement component detected by means of the detector 42 and outputs the transformed component.


Inventors:
TAKIMOTO KIYOSHI
YANO KYOJI
Application Number:
JP25274293A
Publication Date:
April 25, 1995
Filing Date:
October 08, 1993
Export Citation:
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Assignee:
CANON KK
International Classes:
G01B21/30; G01Q20/02; G01Q60/24; G01Q60/26; (IPC1-7): G01B21/30
Attorney, Agent or Firm:
Wakabayashi Tadashi