Title:
ION MICROANALYZER
Document Type and Number:
Japanese Patent JPS5376887
Kind Code:
A
Abstract:
PURPOSE: To reduce the contamination of a reflecting mirror produced by the materials flying off from the specimen by movably constituting a stereoscopic microscope in such a way that its reflecting mirror is insertable to the passage where ion beam passes.
Inventors:
FUJIWARA MITSUO
SHIBATA ATSUSHI
SHIBATA ATSUSHI
Application Number:
JP15199176A
Publication Date:
July 07, 1978
Filing Date:
December 20, 1976
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/22; G01N23/225; H01J37/252; (IPC1-7): G01N23/225