Title:
イオン加工装置
Document Type and Number:
Japanese Patent JP4601368
Kind Code:
B2
Inventors:
Kenichi Ogawa
Application Number:
JP2004275225A
Publication Date:
December 22, 2010
Filing Date:
September 22, 2004
Export Citation:
Assignee:
ShinMaywa Industries,Ltd.
International Classes:
C23C14/32; C23C14/50
Domestic Patent References:
| JP5271935A | ||||
| JP10068065A | ||||
| JP3079764A | ||||
| JP2002226968A | ||||
| JP2003226962A | ||||
| JP2004099983A | ||||
| JP3036263A |
Attorney, Agent or Firm:
Yoshihiro Tsunoda
Yasu Furukawa
Yasu Furukawa