ISOTROPIC DOPING OF SEMICONDUCTOR MATERIAL

Title:

ISOTROPIC DOPING OF SEMICONDUCTOR MATERIAL

Document Type and Number:

Japanese Patent JPS61137316

Kind Code:

A

Inventors:

ROBAATO ARAN BAAKAA
CHIYUANGU CHIYUANGU TSUAI
JIYON SHII NAITSU

Application Number:

JP26827785A

Publication Date:

June 25, 1986

Filing Date:

November 28, 1985

Export Citation:

Assignee:

XEROX CORP

International Classes:

H01L21/205; H01L21/22; H01L21/225; (IPC1-7): H01L21/205; H01L21/225

Attorney, Agent or Firm:

Asamura Akira

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