Title:
JIG FOR PREVENTING POSITIONAL DEVIATION OF INTEGRATED CIRCUIT PACKAGE
Document Type and Number:
Japanese Patent JPH08167635
Kind Code:
A
Abstract:
PURPOSE: To prevent the positional deviation of an integrated circuit package positioned in a visual inspector when the package is set on a low-frictional coefficient inspecting stage of the inspector by a carrying jig.
CONSTITUTION: With keeping away from a rubber-made suction pad (nozzle) 8 at the top end of a carrying arm 7, a tubular jig 9 having a spring 14 is moved to depress a mold surface of an integrated circuit package 1 enough to change it from its suction state to a suction stop stage while the shear exerted on the package 1 due to the elastic deformation of the pad 8 is forcibly suppressed by the total load of the elastic force of the spring 14 and the weight of the jig 9.
Inventors:
YAMAGUCHI TOMOHARU
Application Number:
JP30853094A
Publication Date:
June 25, 1996
Filing Date:
December 13, 1994
Export Citation:
Assignee:
NEC CORP
International Classes:
H01L21/66; (IPC1-7): H01L21/66
Domestic Patent References:
| JPH0285583U | 1990-07-05 | |||
| JPH0572386U | 1993-10-05 | |||
| JPH0526284U | 1993-04-06 |
Attorney, Agent or Firm:
Sugano Naka