Title:
JOSEPHSON JUNCTION STRUCTURE BODY AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH05335638
Kind Code:
A
Abstract:
PURPOSE:To facilitation manufacturing and improved performance by forming an oxide superconductive thin film with a crystalline grain boundary at a step part. CONSTITUTION:An NaCl layer 14 is formed on a substrate 5 where a photoresist layer 13 is formed. Then, the NaCl layer 14 is left only at the left side of the substrate forming surface by eliminating the photoresist layer 13. Then, an MgO layer 15 is formed on the substrate 5. Then, when the substrate 5 where the MgO layer 15 is formed is washed, the NaCl layer 14 as well as a part on the NaCl layer 14 of the MgO layer 15 are eliminated, the MgO layer 15 remains only at the right side on the substrate surface, and a step is formed. Finally, when an Y1Ba2Cu3O7-X oxide superconductive thin film is formed on the substrate 5 where the step is formed, a part on the edge of the MgO layer 15 becomes a crystalline magnetic field 3. Therefore, a part 2 on the MgO layer 15 of the Y1Ba2Cu3O7-X oxide superconductive thin film and a part 1 which is directly formed on the substrate become a Josephson junction with the crystalline grain boundary 3 as a barrier wall.
Inventors:
TANAKA SABURO
MATSUURA TAKASHI
ITOZAKI HIDEO
MATSUURA TAKASHI
ITOZAKI HIDEO
Application Number:
JP16415192A
Publication Date:
December 17, 1993
Filing Date:
May 29, 1992
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
H01L39/22; H01L39/24; (IPC1-7): H01L39/22; H01L39/24
Attorney, Agent or Firm:
Takashi Koshiba