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Title:
LAMINAR FLOW ELEMENT AND LAMINAR FLOW TYPE FLOWMETER
Document Type and Number:
Japanese Patent JP2020148486
Kind Code:
A
Abstract:
To facilitate the connection design of a pressure sensor and a pressure receiving part.SOLUTION: A metal sheet 2 in which pressure derivation holes 2-1 and 2-2 are formed is stacked on top of a metal sheet 1 in which a channel 1-1 constituting a flow path LA1 is formed. A metal sheet 3 in which pressure derivation holes 3-1 and 3-2 are formed is stacked on top of the metal sheet 2. A metal sheet 4 in which pressure derivation holes 4-1 and 4-2 are formed is stacked on top of the metal sheet 3. The pressure derivation hole 3-1 of the metal sheet 3 is made to be a long hole, a portion of which is made to overlap the pressure derivation hole 2-1 of the metal sheet 2 and the pressure derivation hole 4-1 of the metal sheet 4. The pressure derivation hole 3-2 of the metal sheet 3 is made to be a long hole, a portion of which is made to overlap the pressure derivation hole 2-2 of the metal sheet 2 and the pressure derivation hole 4-2 of the metal sheet 4. The pressure derivation holes 4-1 and 4-2 of the metal sheet 4 are formed at positions shifted relative to the pressure derivation holes 2-1 and 2-2 of the metal sheet 2.SELECTED DRAWING: Figure 1

Inventors:
YUKI KOJI
Application Number:
JP2019043843A
Publication Date:
September 17, 2020
Filing Date:
March 11, 2019
Export Citation:
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Assignee:
AZBIL CORP
International Classes:
G01F1/48; G01F1/00; G01F1/50; G01F1/78; G01F15/04
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa