PURPOSE: To shorten the necessary working time by installing a detecting means for detecting the inclination of a lapping jig on the jig itself, detecting the inclination of the lapping jig, and detecting the eccentric abrasion of a polished member.
CONSTITUTION: A polished member 4 is fixed onto the adhesion surface 2a of a lapping jig 2 through paraffin 5. The body 20 of the jig 2 is formed into a disc form, and a level 9 as a detecting means for detecting the inclination of the body 20 is fixed at the center part on the upper side. When eccentric abrasion is generated on a polished member 4, as lapping work advances, the air bubble 10 in the level 9 loaded onto the jig 2 shifts from the center position, and thus the inclination can be detected.
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MATSUZAWA AKIYOSHI
KAMIYAMA HIDEKI
MUKOUYAMA SHIYUUJI