Title:
レーザアニール方法、装置及びマイクロレンズアレイ
Document Type and Number:
Japanese Patent JP5495043
Kind Code:
B2
Inventors:
Mizumura Tsushin
Yoshio Watanabe
Makoto Hatanaka
Yoshio Watanabe
Makoto Hatanaka
Application Number:
JP2010100298A
Publication Date:
May 21, 2014
Filing Date:
April 23, 2010
Export Citation:
Assignee:
Buoy Technology Co., Ltd.
International Classes:
H01L21/20; H01L21/268
Domestic Patent References:
| JP2010075982A | ||||
| JP2005197730A | ||||
| JP2004311906A | ||||
| JP2003109911A | ||||
| JP2001269789A | ||||
| JP8086901A | ||||
| JP8023105A |
Attorney, Agent or Firm:
Masanori Fujimaki