To place the device without using a glass plate to support a substrate to be placed with respect to a device having a table to place a thin/large substrate to be placed.

A table 12 is arranged on a XY stage consisting of a X-stage 11 and a Y-stage 12. The table 13 is formed into a frame form having a roughly square shape plane viewing having a rectangular opening part in its inside and has contact faces to receive four sides of a liquid crystal substrate 16 to its four sides. Furthermore, a pair of long sides among each side are bent to a circular arc of large curvature. Also, outside these long sides, the projecting lines to guide both side edge parts of the liquid crystal substrate 16 are formed. The liquid crystal substrate 16 loaded is held without falling off from the opening of the table 13 by bending in its longitudinal direction.