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Title:
LASER BEAM MACHINING APPARATUS
Document Type and Number:
Japanese Patent JP2012179644
Kind Code:
A
Abstract:

To provide a laser beam machining apparatus free from falsely recognizing a height position of a frame body of a chuck table as a height position of a workpiece.

The laser beam machining device includes: the chuck table including a holding part for holding the workpiece and a metal frame body surrounding the holding part; and a detection means which irradiates a measuring laser beam to an upper surface of the workpiece held by the chuck table from right above, and detects the height position of the upper surface of the workpiece by receiving reflected light of the measuring laser beam reflected to right above at the upper surface of the workpiece. The metal frame body is processed to suppress reflection to right above even if the measuring laser beam is irradiated from right above.


Inventors:
FURUTA KENJI
NOMURA HIROSHI
Application Number:
JP2011045131A
Publication Date:
September 20, 2012
Filing Date:
March 02, 2011
Export Citation:
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Assignee:
DISCO CORP
International Classes:
B23K26/10; B23K26/03; H01L21/301
Domestic Patent References:
JPS6372496A1988-04-02
JPH07178577A1995-07-18
JP2002292486A2002-10-08
JP2005116208A2005-04-28
JP2005193286A2005-07-21
JPH04111987A1992-04-13
JP2010082644A2010-04-15
Foreign References:
US0008025A1851-04-08
EP1707298A12006-10-04
US0006012A1849-01-09
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito