To provide a laser beam machining method by which an unnecessary cleavage is not caused on the surface of a work and the surface is not melted.
The laser beam machining method comprises a process for placing a work 1 on the placing table 107 of a laser beam machining apparatus 100, a process for forming an intended cutting part based on a reformed region in the inside of a work 1 along the intended cutting line 5 of the work 1 by adjusting a converging point P in the inside of the work 1 and by irradiating the work 1 with a laser beam L, a process for transporting the work 1 in which the intended cutting part based on the reformed region is formed and placing it on the placing plate of an absorptive laser irradiation apparatus, and a process for cutting the work 1 by irradiating the surface of the work 1 with an absorptive laser beam and making a crack arrive at the surface of the work 1 from the internal reformed region of the work 1 as a starting point.
FUKUMITSU KENJI
UCHIYAMA NAOKI
WAKUTA TOSHIMITSU
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