PURPOSE: To enable laser irradiation at high speed for a wide area by performing prescribed laser irradiation with a pair of revolving mirrors and a flat field lens in a rectangular flat area and connecting the rectangular areas in matrix.
CONSTITUTION: One rectangular area in the substrate 6 of an object to be machined is positioned right below a fθ lens 9 by moving XY stages 7, 8. A galvanometer mirror 5 is rotated and positioned, and synchronously a laser beam 2 is emitted from a laser generator 1. The laser beam 2 is transmitted by a bending mirror 3, reflected by the galvanometer mirror 5, and converged on the substrate 6 with the fθ lens 9 for a prescribed machining. The next rectangular area in the substrate 6 is positioned right below the fθ lens 9 by means of the XY stages 7, 8 so as to be machined with the laser beam. Because of the combination between the revolving mirror 5 and the flat field lens 9, the laser beam 2 is positioned at high speed.
NAKAI IZURU
UESUGI YUJI
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