To provide a laser cleaning apparatus and method capable of stably cleaning the surface of an object without exerting a thermal damage thereon.
Fine liquid drops formed by an ultrasonic vibrator 21 are sprayed on the surface of the object 5 to form a liquid film 50 which is, in turn, irradiated to be heated with pulse laser beam from a first pulse laser beam source 31. Simultaneously with irradiation or before or after irradiation, fine particles adhering to the surface of the object are irradiated to be heated with pulse laser beam from a second pulse laser beam source 32 and thermally expanded to be separated from the object 5. The fine particles are removed from the surface of the object 5 by evaporation of the liquid film 50 and discharged to the outside by a suction device 4.
FUKUMITSU KENJI
Next Patent: CLEANING APPARATUS FOR POWDER HOUSING CONTAINER