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Title:
LASER CLEANING APPARATUS AND METHOD
Document Type and Number:
Japanese Patent JP2003047923
Kind Code:
A
Abstract:

To provide a laser cleaning apparatus and method capable of stably cleaning the surface of an object without exerting a thermal damage thereon.

Fine liquid drops formed by an ultrasonic vibrator 21 are sprayed on the surface of the object 5 to form a liquid film 50 which is, in turn, irradiated to be heated with pulse laser beam from a first pulse laser beam source 31. Simultaneously with irradiation or before or after irradiation, fine particles adhering to the surface of the object are irradiated to be heated with pulse laser beam from a second pulse laser beam source 32 and thermally expanded to be separated from the object 5. The fine particles are removed from the surface of the object 5 by evaporation of the liquid film 50 and discharged to the outside by a suction device 4.


Inventors:
MURAMATSU KENICHI
FUKUMITSU KENJI
Application Number:
JP2001241235A
Publication Date:
February 18, 2003
Filing Date:
August 08, 2001
Export Citation:
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Assignee:
HAMAMATSU PHOTONICS KK
International Classes:
G02F1/13; B08B3/02; B08B3/10; B08B3/12; B08B7/00; B23K26/00; G02F1/1333; G11B23/50; H01L21/304; B23K101/36; (IPC1-7): B08B7/00; B08B3/02; B08B3/10; B08B3/12; B23K26/00; G02F1/13; G02F1/1333; G11B23/50; H01L21/304
Attorney, Agent or Firm:
Yoshiki Hasegawa (2 outside)