Title:
Laser system
Document Type and Number:
Japanese Patent JP6363711
Kind Code:
B2
Abstract:
A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.
Inventors:
Akiyoshi Suzuki
Wakabayashi Osamu
Masaki Arakawa
Koshi Ashikawa
Listing Yasuhiro
Wakabayashi Osamu
Masaki Arakawa
Koshi Ashikawa
Listing Yasuhiro
Application Number:
JP2016532384A
Publication Date:
July 25, 2018
Filing Date:
July 11, 2014
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H01S3/23; H01S3/00; H01S3/10
Domestic Patent References:
| JP2005294493A | ||||
| JP2012227353A | ||||
| JP2002176007A | ||||
| JP2002176006A | ||||
| JP11511295A | ||||
| JP4236471A | ||||
| JP57050486A | ||||
| JP51120696A |
Foreign References:
| US20130342895 |
Attorney, Agent or Firm:
Hosaka Enju