To provide a temperature-sensitive member which can simply respond to sizes or shapes of internal spaces of various objects to be inspected in a leakage inspection device for correcting a temperature by the temperature-sensitive member.
High-pressure gas is introduced into a temperature-sensitive chamber 72 in a temperature-sensitive member 70 of a leakage inspection device 1 and a chamber 9a to be inspected of the object 9 to be inspected, respectively. After these chambers 72, 9a are made to be closed systems which are independent from each other, the pressure change of the chamber 9a to be inspected is measured, and data on the temperature change of the chamber 9a to be inspected is actually obtained by measuring the pressure change of the temperature-sensitive chamber 72, then leakage is determined on the basis of the data of the pressure change and temperature change of the chamber 9a to be inspected. The temperature-sensitive member 70 is constituted of a tube and preferably wound or folded according to the shape of the internal space of the object 9 to be inspected.
ICHIKAWA YUSUKE
ITO MASAKAZU
| JP2007064737A | 2007-03-15 | |||
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Harada Sanjugi