Title:
A Li content oxide target zygote and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6231428
Kind Code:
B2
Abstract:
Provided is a target assembly which is manufactured by bonding a Li-containing oxide sputtering target and an Al-based or Cu-based backing plate through a bonding material. The Li-containing oxide target assembly does not undergo warping or cracking during the bonding. The Li-containing oxide target assembly according to the present invention is manufactured by bonding a Li-containing oxide sputtering target to a backing plate via a bonding material, and has bending strength of 20 MPa or larger.
Inventors:
Yuichi Taketomi
Kanamaru Moriga
Shintaro Yoshida
Kanamaru Moriga
Shintaro Yoshida
Application Number:
JP2014092534A
Publication Date:
November 15, 2017
Filing Date:
April 28, 2014
Export Citation:
Assignee:
Kobelco Kaken Co., Ltd.
International Classes:
C04B35/01; C23C14/34; C04B37/02
Domestic Patent References:
| JP2012136417A | ||||
| JP2011521421A | ||||
| JP11157844A | ||||
| JP2010202930A | ||||
| JP3152108B2 | ||||
| JP2012020911A | ||||
| JP11049562A | ||||
| JP2000239838A | ||||
| JP201353324A | ||||
| JP2002146523A | ||||
| JP200269627A |
Foreign References:
| WO2011086650A1 | ||||
| WO2009142289A1 | ||||
| WO2012086557A1 |
Attorney, Agent or Firm:
Patent business corporation glory patent office
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