Title:
LIGHT INFILTRATING DEVICE TO WAVEGUIDE THIN FILM
Document Type and Number:
Japanese Patent JPH01147411
Kind Code:
A
Abstract:
PURPOSE:To facilitate the adjustment by rotating a first reflection mirror by theta deg. and bringing a second reflection mirror to rotational movement by 2theta deg.by an interlocking means. CONSTITUTION:A rotation axis X of a plane mirror 14 coincides with one focal position of an ellipse E, and an edge line 18Aa of a prism coupler 18A coincides with the other focal position of the ellipse E. A laser beam LB is reflected successively by a rectangular prism 12 and plane mirrors 14, 16 made incident vertically on the prism coupler 18A, converged to a position of its edge line 18Aa, and infiltrated into a waveguide thin film 22. When the plane mirror 14 is rotated by theta deg. centering around the rotation axis X, the plane mirror 16 interlocks with its rotation and rotates by 2theta deg. centering around a rotation axis Y, and also, brought to rotational movement, while bringing it reflecting surface into contact with the ellipse E. In such a way, as for a fixed position of a substrate 20, it is unnecessary to adjust it again even if rotational angle of the plane mirror 14 is changed, by adjusting said position once, and the adjustment is facilitated.
Inventors:
IKEDA TAKESHI
KOBAYASHI TAKAO
SASAKI HIROKI
FUJIWARA KANJI
KOBAYASHI TAKAO
SASAKI HIROKI
FUJIWARA KANJI
Application Number:
JP30653787A
Publication Date:
June 09, 1989
Filing Date:
December 03, 1987
Export Citation:
Assignee:
JAPAN SPECTROSCOPIC CO
International Classes:
G01N21/64; G01B11/06; G01N21/65; G02B6/122; G02B6/30; G02B6/34; (IPC1-7): G01B11/06; G01N21/64; G01N21/65; G02B6/12; G02B6/30
Attorney, Agent or Firm:
Matsumoto Shinkichi
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