Title:
光照射装置および変調マスク
Document Type and Number:
Japanese Patent JP5424125
Kind Code:
B2
Inventors:
Yukio Taniguchi
Application Number:
JP2010078000A
Publication Date:
February 26, 2014
Filing Date:
March 30, 2010
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
B23K26/066
Domestic Patent References:
| JP2006049481A | ||||
| JP2002098930A | ||||
| JP11147185A | ||||
| JP2003029144A | ||||
| JP2006317806A |
Attorney, Agent or Firm:
Hirohito Katsunuma
Hiroyuki Nagai
Katsuomi Isogai
Satoshi Nazuka
Junpei Okada
Hideyuki Mori
Yukihiro Hotta
Hiroyuki Nagai
Katsuomi Isogai
Satoshi Nazuka
Junpei Okada
Hideyuki Mori
Yukihiro Hotta