Title:
垂直炉用のライナーおよびフランジ組立品ならびにライナーおよび垂直炉
Document Type and Number:
Japanese Patent JP7467723
Kind Code:
B2
Abstract:
a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.
Inventors:
Lucian Idira
Chris de Ridder
Theodorus Oosterlaken
Klaas P. Bournestra
Chris de Ridder
Theodorus Oosterlaken
Klaas P. Bournestra
Application Number:
JP2023053849A
Publication Date:
April 15, 2024
Filing Date:
March 29, 2023
Export Citation:
Assignee:
AS MIP Holding B F
International Classes:
H01L21/31; H01L21/22; H01L21/324
Domestic Patent References:
| JP201161037A | ||||
| JP2007243201A | ||||
| JP2014236129A | ||||
| JP200954988A | ||||
| JP2002110562A | ||||
| JP2004319979A |
Attorney, Agent or Firm:
Yasuhiko Murayama
Shinya Mihiro
Tatsuhiko Abe
Shinya Mihiro
Tatsuhiko Abe
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