Title:
LIQUID CRYSTAL DISPLAY DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH05173180
Kind Code:
A
Abstract:
PURPOSE:To reduce a generation rate of a picture element fault and defect on an image display by constituting a gate wiring of a thin film transistor of two layers of a first conductive layer and a second conductive layer with which the first conductive layer is covered. CONSTITUTION:A first conductive layer 7a having a large ionization tendency and a low resistance, for instance, Cr is formed by the minimum wiring width having no problem on an image quality as a gate wiring resistance in a part of a gate wiring 7. Subsequently, a second conductive layer 7b having a small ionization tendency and a high resistance, for instance, MoSi2 is formed thereon so as to cover it with wider wiring width than a first conductive layer 7a, while holding electrical contact with a first conductive layer 7a, and also, the greater part of a gate of a channel part of a field effect transistor is formed and a gate wiring is formed. In this case, as for a first conductive layer 7a, if only a low resistance sufficient to display a normal image by the gate wiring can be secured, wiring patterns divided into plural pieces may be also available.
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Inventors:
SEKADO YASUTO
SAITO HIROKI
TAKEZAWA HIROYOSHI
YONEKURA HIROAKI
NARUSHIGE YASUSHI
SAITO HIROKI
TAKEZAWA HIROYOSHI
YONEKURA HIROAKI
NARUSHIGE YASUSHI
Application Number:
JP34432091A
Publication Date:
July 13, 1993
Filing Date:
December 26, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; H01L29/786; (IPC1-7): G02F1/1343; G02F1/136
Attorney, Agent or Firm:
Akira Kobiji (2 outside)