PURPOSE: To provide the liquid crystal display device which can prevent the deterioration in nonlinearity of the I-V characteristic of an MIM element and can improve display characteristics.

CONSTITUTION: A metallic film to constitute a first metal 3 of the MIM element A is formed on a lower glass substrate 2. This metallic film is then patterned by using an ordinary photolithography method to obtain the first metal 3. In succession, the first metal 3 is anodically oxidized, by which an insulating film 4 is formed. A second metal 5 is formed by sputtering on this insulating film 4 to produce the MIM element A. The heating temp. of the glass substrate 2 at the time of sputtering is kept at 150°C in order to prevent the deterioration in the linearity of the I-V characteristic of the MIM element A by heat.