Title:
LIQUID CRYSTAL DISPLAY ELEMENT AND ITS PRODUCTION
Document Type and Number:
Japanese Patent JP3403802
Kind Code:
B2
Abstract:
PURPOSE: To obtain a liquid crystal display element which features a large holding capacity, decreased shorting defects of holding capacitance elements, a high yield and a large opening rate by composing the holding capacitance films of at least two layers of metallic oxidized films consisting of metals which can be anodically oxidized.
CONSTITUTION: The holding capacitance electrodes 11 which are one electrode of the holding capacitance elements 1 which consist of ITO, Al, etc., two layers of the holding capacitance films 12a, 12b which consist Al2O3, T2O5, etc., formed by anodic oxidation from metals, such as Al and Ta, and pixel electrodes 13 which are formed continuously with electrodes for pixels exclusive of the element 1 parts and consist of ITO, etc., are successively formed on the surface of a transparent insulating substrate 3. The films 12a, 12b are anodically formed from the first and second metallic films which are separately formed. Dust and pinholes exist independently in the metals but usually appear in different positions and the probability of their appearance in the same position is extremely low. Then, the probability that the electrodes 11 and 13 generate the short circuit defects to be caused by the dust A and the pinholes B arise is low.
Inventors:
Yuzo Ohdoi
Satoshi Kodama
Akihiro Watanabe
Satoshi Kodama
Akihiro Watanabe
Application Number:
JP8047094A
Publication Date:
May 06, 2003
Filing Date:
April 19, 1994
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
G02F1/136; G02F1/1368; H01L21/336; H01L29/78; H01L29/786; (IPC1-7): G02F1/1368; H01L29/786
Domestic Patent References:
| JP3293329A |
Attorney, Agent or Firm:
Sota Asahina (1 person outside)
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